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E This standard was editorially modified in October 2009 to correct editorial errors
This Specification has two classifications: General Usage and Auto Transport Usage
SEMI E138-0305 (first published)
SEMI E40— Standard for Processing Management
This Standard was technically approved by the Flat Panel Display – Color Filter & Optical Elements Global Technical Committee
C06400 - SEMI C64 - SEMI Statistical Guidelines for Ship To Control Revision:SEMI C64-0308 - Superseded E This standard was editoriallyTo provide a set of guidelines for the quantitative determination of statistically derived limits from process data for the purpose of defining and maintaining ship to control (STC) limits. This Guide applies to specified properties of specific products for which it is desired to use statistically derived control limits upon which customer notification, negotiated disposition of product, or statistical specifications can be based. Referenced SEMI
